Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings
Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings
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DOI：
10.1016/0257-8972(93)90331-h
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发表时间：
1993-04
影响因子：
5.4
通讯作者：
X. Chu;S. Barnett;M. Wong;W. Sproul
中科院分区：
文献类型：
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作者：
X. Chu;S. Barnett;M. Wong;W. Sproul
采用对置双阴极非平衡磁控溅射系统，在M2工具钢衬底上沉积了周期为2.5~150 nm的TiN/NbN多晶超晶格薄膜。包括X射线衍射在内的分析技术。用俄歇能谱和透射电子显微镜对超晶格涂层的结构进行了表征。结果表明，TiN和NbN层结构清晰，但界面并不平整或陡峭。利用维氏显微硬度计和划痕试验机对超晶格涂层的力学性能进行了表征。6μm厚的超晶格薄膜的显微硬度范围为180 0~5 2 0 0kgf mm−2(HR 0.0 5)，并强烈依赖于几个沉积参数，如超晶格周期λ、氮气分压、气体流量与靶的比例以及负衬底偏压。当λ≈为6 nm，V_s=150V时，超晶格涂层的硬度最高。
An opposed dual-cathode unbalanced magnetron sputtering system was used to deposit polycrystalline TiN/NbN superlattice coatings, with periods between 2.5 nm and 150 nm, on M2 tool steel substrates. Analytical techniques including X-ray diffraction. Auger spectroscopy and transmission electron microscopy were used to characterize the structure of the superlattice coatings. These showed that well-defined TiN and NbN layers were obtained, but the interfaces were not perfectly planar or abrupt. The mechanical properties of the superlattice coatings were characterized using a Vickers' microhardness tester and scratch tester. Microhardness values for the 6 μm thick superlattice coatings ranged from 1800 to 5200 kgf mm−2(Hr 0.05) and were strongly dependent on several deposition parameters such as superlattice period λ, nitrogen partial pressure, the ratio of gas flow to each target, and the negative substrate biasVs. The highest hardness values were obtained for λ≈6 nm andVs=150 V. The scratch adhesion critical load of superlattice coatings ranged from 1.8 kgf atVs=200 V to 11 kfg atVs=34 V.