Development of a Compact FE-SEM and X-Ray Microscope with a Carbon Nanotube Electron Source
Development of a Compact FE-SEM and X-Ray Microscope with a Carbon Nanotube Electron Source
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开发带有碳纳米管电子源的紧凑型 FE-SEM 和 X 射线显微镜
DOI：
10.1088/1757-899x/304/1/012006
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
M. Irita and S. Yamazaki and H. Nakahara and Y. Saito
中科院分区：
文献类型：
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作者：
大垣武;坂口勲; 大橋直樹;羽田肇;M. Irita and S. Yamazaki and H. Nakahara and Y. Saito
碳纳米管（CNT）作为场致电子发射体具有多种优点。多壁CNT（MWNT）显示出高亮度，并且即使在10 - 6-10 - 7 Pa的差的高真空条件下，场发射（FE）电流也是稳定的，而没有离子泵浦。在这项研究中，我们已经实验性地制造了一个紧凑的复合场发射扫描电子显微镜（FE-SEM）和X射线显微镜（XRM）与一个单一的隔离MWNT电子源。来自MWNT的电子束通过Butler静电透镜聚焦和加速。在Butler电压Vbut = 1.5 kV和加速电压Vacc = 15 kV下观察到稳定的SEM图像，聚焦探针电流Ifoc = 61 pA。从聚苯乙烯乳胶球的80-20%边缘轮廓估计的SEM的空间分辨率为约9 nm。XRM图像通过在V but= 1.5 kV和V acc = 17 kV下暴露30 min获得。XRM的空间分辨率约为200 nm。本研究结果证明了在10-7 Pa下使用单个隔离MWNT电子源的紧凑型FE-SEM和XRM的高性能。
A carbon nanotube (CNT) possesses various benefits as a field electron emitter. Multi-walled CNT (MWNT) have exhibited high brightness and the field emission (FE) current is stable even under poor high-vacuum condition of 10− 6–10− 7 Pa without ion pumping. In this study, we have experimentally manufactured a compact composite field emission scanning electron microscope (FE-SEM) and X-ray microscope (XRM) with a single isolated MWNT electron source. An electron beam from a MWNT was focussed and accelerated by a Butler electrostatic lens. Stable SEM images were observed at a Butler voltage V but= 1.5 kV and accelerating voltage V acc≃ 15 kV with a focussed probe current I foc= 61 pA. The spatial resolution of the SEM, which was estimated from 80–20% edge profile of polystyrene latex spheres, was about 9 nm. XRM images were acquired by 30-min exposure at V but= 1.5 kV and V acc≃ 17 kV. A spatial resolution of about 200 nm was obtained for XRM. The present results prove the high performance of the compact FE-SEM and XRM using a single isolated MWNT electron source at 10–7 Pa.