Holographic femtosecond laser processing with multiplexed phase Fresnel lenses
Holographic femtosecond laser processing with multiplexed phase Fresnel lenses
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DOI：
10.1364/ol.31.001705
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发表时间：
2006-06-01
期刊：
影响因子：
3.6
通讯作者：
Nishida, Nobuo
中科院分区：
文献类型：
--
作者：
Hasegawa, Satoshi;Hayasaki, Yoshio;Nishida, Nobuo
提出了一种基于相位复用菲涅耳透镜的飞秒激光全息加工方法，用于微结构的高速并行加工。空间光调制器（SLM）的使用允许衍射峰的独立可调谐性、三维平行性和任意可变特征。通过在考虑照射的激光脉冲的强度分布和SLM的空间频率响应的同时改变每个相位菲涅耳透镜的中心相位和尺寸，使衍射峰均匀。(c)2006年美国光学学会
Holographic femtosecond laser processing with multiplexed phase Fresnel lenses for high-speed parallel fabrication of microstructures is proposed. Use of a spatial light modulator (SLM) allows independent tunability of the diffraction peaks, three-dimensional parallelism, and arbitrary, variable features. The diffraction peaks are made uniform by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the SLM. (c) 2006 Optical Society of America