Influences of Growth Conditions to Morphology of ZnO Thin Films Electrolessly Deposited on Pd Catalyst
Influences of Growth Conditions to Morphology of ZnO Thin Films Electrolessly Deposited on Pd Catalyst
复制标题
生长条件对Pd催化剂上化学沉积ZnO薄膜形貌的影响
DOI：
10.2109/jcersj2.115.850
复制
发表时间：
2007
影响因子：
1.1
通讯作者：
K. Koumoto
中科院分区：
文献类型：
--
作者：
N. Saito;H. Haneda;K. Koumoto
在硝酸锌和二甲胺-硼烷(DMAB)水溶液中化学沉积了氧化锌薄膜。在石英衬底上溅射生长的Pd催化层上沉积了氧化锌。考察了生长条件对氧化锌薄膜形貌的影响。在30℃下观察到无定形凝胶状沉积，在40℃下沉积了无定形凝胶和氧化锌晶体，在55℃以上得到了颗粒很少的单颗粒氧化锌薄膜。氧化锌的形貌依赖于锌的浓度(0.01-0.5mol.dm-3)。在低锌浓度下，沉积出由纤维组成的纺锤形颗粒。在高锌浓度下，可观察到数微米的血小板沉积。对于六方形氧化锌的沉积，锌浓度以0.05mol·dm-3为宜。DMAB的浓度(0.001-0.05mol.dm-3)对沉积的形貌没有影响。在55℃时，刚浸泡在溶液中就开始沉积。最初沉积的是由小颗粒(10-30 nm)组成的约200 nm的团聚颗粒。随着颗粒的长大，颗粒呈六角形。反应4h，六方氧化锌颗粒长大到微米级，在较高的反应温度下，初始成核密度较高，在较短的时间内即可得到颗粒较细的氧化锌薄膜。催化层被氧化锌覆盖后，生长速度变慢，但由于DMAB的热分解，生长仍在继续。
ZnO films were electrolessly deposited in the aqueous solution of zinc nitrate and dimethylamine-borane (DMAB). ZnO was deposited on the Pd catalyst layer grown by sputtering on the quartz substrate. The influences of the growth conditions to the morphology of the ZnO films have been examined. Amorphous gel-like deposits were observed at 30°C. Both amorphous gel and ZnO crystals were deposited at 40°C. Above 55°C, ZnO mono-particulate films with few particles being observed on them were obtained. The morphology of the ZnO depended on the concentration of Zn (0.01-0.5 mol•dm-3). In a low Zn concentration, spindle-shaped particles composed of fibers were deposited. In a high Zn concentration, platelet deposits of a few micrometers were observed. For deposition of hexagonal shape ZnO, the Zn concentration of 0.05 mol•dm-3 was suited. The concentrations of DMAB (0.001-0.05 mol•dm-3) did not influence the morphology of the deposits. At 55°C, the deposition began just after soaking in the solution. Initially, the agglomerated particles of about 200 nm composed of small particles (10-30 nm) were deposited. According to the particle growth, the particles became hexagonal in shape. The hexagonal ZnO particles grew to micron sizes by the reaction for 4 h. At high reaction temperatures, the initial nucleation density was higher, and ZnO films of finer particles were obtained in a short period. After the catalyst layer was covered by ZnO, the growth rate became slow, but the growth continued due to the thermal decomposition of DMAB.
聚碳酸酯上沉积铝薄膜的微图形化方法
DOI：
--
发表时间：
2020
期刊：
影响因子：
--
作者：
T. Yoshida;H. Nojiri;M. Okoshi
通讯作者：
M. Okoshi
影响因子：
3.8
作者：
Masuda, Y;Kinoshita, N;Koumoto, K
通讯作者：
Koumoto, K
沉积后退火对化学沉积工艺制备的氧化锌图案发光的影响
DOI：
--
发表时间：
2004
期刊：
J.Electrochem.Soc. 151(8)
影响因子：
--
作者：
Noriko Saito;Hajime Haneda;Kunihito Koumoto;他2名
通讯作者：
他2名