Chip scale humidity sensing based on a microfluidic infiltrated photonic crystal
Chip scale humidity sensing based on a microfluidic infiltrated photonic crystal
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DOI：
10.1063/1.4827810
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发表时间：
2013-10-28
影响因子：
4
通讯作者：
Eggleton, B. J.
中科院分区：
文献类型：
--
作者：
Casas-Bedoya, A.;Shahnia, S.;Eggleton, B. J.
这项工作提出了一种基于渗透液体进入硅光子晶体亚微米孔的吸湿行为的光学片上湿度传感器。液体折射率的直接测量结合数值模拟表明，该装置的灵敏度是由于液体折射率和体积的变化。我们报道了响应时间为0.1 ms的湿度传感，并研究了传感器的稳定性和可逆性。该演示突出了光流体在光子晶体电路中提供的灵敏度，以及实现超紧凑集成湿度传感组件的潜力。(c) 2013 AIP出版有限责任公司
This work presents an optical on-a-chip humidity sensor based on the hydroscopic behavior of an infiltrated liquid into the sub-micron holes of a silicon photonic crystal. Direct measurements of the liquid refractive index in combination with numerical simulations show that the sensitivity of the device is due to changes of both the liquid's refractive index and volume. We report humidity sensing with a response time of 0.1 ms and study the stability and reversibility of the sensor. This demonstration highlights the sensitivity offered by optofluidics in photonic crystal circuits and the potential for realizing ultra-compact integrated humidity sensing components. (c) 2013 AIP Publishing LLC.