First report on a European round robin for slope measuring profilers
First report on a European round robin for slope measuring profilers
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关于坡度测量剖面仪欧洲循环赛的第一份报告
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
F. Siewert
中科院分区：
文献类型：
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作者：
A. Rommeveaux;M. Thomasset;D. Cocco;F. Siewert
在“X射线和中子光学”（COST P7）科学和技术研究行动领域的欧洲合作框架内，并遵循上次X射线和中子光学计量学国际研讨会上宣布的决定，（格勒诺布尔，2004年4月），四个欧洲同步加速器的计量设施，Bessy，Elettra，ESRF和Soleil，已经决定并开始了一项仪器比对计划。其他同步加速器正在加入我们，并邀请更多感兴趣的机构参与这一开放式测量比较。所涉及的计量仪器是不同种类的直接斜率测量设备，如众所周知的长轨迹轮廓仪（自制或改装）和Bessy N.O.M.。循环赛由Bessy和Elettra提供的2个平面镜和2个球面镜（三个由Zerodur制成，一个由熔融石英制成）开始。后来增加了一个来自SOLEIL的短曲率半径的硅球面镜。第一个结果表明，所有设施的测量值之间非常接近的匹配，提供了相同的程序遵循。特别是，必须特别注意支持引用对象的方式，这将通过一些示例进行说明。另一个重要问题是不同仪器的系统误差的特性以及如何减少或消除这些误差。本文希望对不同的商业和定制或修改的轮廓仪的性能，以及校准测试的标准程序，包括标准参考面的定义进行讨论。
In the framework of the European COoperation in the field of Scientific and Technical research action on "X-ray and Neutron Optic" (COST P7) and following the decision announced in the last International Workshop on Metrology for X-ray and neutron optic (Grenoble, April 2004), the metrology facilities of four European synchrotrons, Bessy, Elettra, ESRF and Soleil, have decided and started a program of instrument inter-comparison. Other synchrotrons are joining us and further interested Institutions are invited to participate in this open measurement comparison. The metrology instruments involved are different kinds of direct slope measurement devices, like the well known Long Trace Profiler (in house made or modified) and the Bessy N.O.M.. The Round Robin was started with 2 flat and 2 spherical mirrors (three made of Zerodur and one of fused silica) made available by Bessy and Elettra. A short radius of curvature spherical mirror of Silicon from SOLEIL was later added. First results show a very close match between the measurements of all facilities provided that the same procedures are followed. In particular, a special attention has to be given to the way of supporting the reference objects, as it will be illustrated by some examples. Another important issue is the characterization of the systematic errors of the different instruments and how they can be reduced or eliminated. The paper expects to open a discussion on the performances of different commercial and custom made or modified profilometers, and over standard procedures for calibration testing, including the definition of standard reference surfaces.