Local Structures of Carbon Thin Films Synthesized by the Hot Filament Chemical Vapor Deposition Method X-Ray-Absorption Near-Edge Structure and Raman Spectroscopic Studies
Local Structures of Carbon Thin Films Synthesized by the Hot Filament Chemical Vapor Deposition Method X-Ray-Absorption Near-Edge Structure and Raman Spectroscopic Studies
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热丝化学气相沉积法合成碳薄膜的局部结构X射线吸收近边结构和拉曼光谱研究
DOI：
10.1143/jjap.30.1073
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发表时间：
1991
影响因子：
1.5
通讯作者：
Toshiaki Ohta Toshiaki Ohta
中科院分区：
文献类型：
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作者：
Kunishige Edamatsu;Y. Takata;T. Yokoyama;K. Seki;Masanao Tohnan;T. Okada;Toshiaki Ohta Toshiaki Ohta
采用热丝化学气相沉积（CVD）方法，在不同甲烷浓度（1.0 ~ 12.5体积%）和硅衬底温度（770 ~ 1000℃）条件下，用x射线吸收近边结构（XANES）、拉曼光谱（Raman spectroscopy）、扫描电镜（SEM）和x射线衍射（xrd）对合成的碳薄膜进行了表征。在此基础上，推导了甲烷浓度和衬底温度对碳薄膜结构变化的影响。拉曼光谱和XANES光谱的比较证明了XANES光谱对碳薄膜表征的有效性以及这些光谱之间的互补特性。
Various carbon thin films synthesized by the hot filament chemical vapor deposition (CVD) method with various methane concentrations in hydrogen (1.0-12.5 vol.%) and temperatures of Si substrate (770-1000°C) were characterized by X-ray-absorption near-edge structure (XANES) and Raman spectroscopies as well as by scanning electron microscopy (SEM) and X-ray diffraction. Based on these results, the structural change of carbon thin films is deduced as a function of methane concentration and substrate temperature. Comparison between the Raman and XANES spectra demonstrates the usefulness of XANES spectroscopy for the characterization of carbon thin films and the complementary character between these spectroscopies.
Toshihiko Ohta：“凝胶压制法中UHMW-PE超拉伸行为的研究。（2）溶液冷却速率对拉伸强度和模量增加速率的影响。”
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