Nanodiodes on a Digestible Substrate
Nanodiodes on a Digestible Substrate
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DOI：
10.1109/led.2022.3231080
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发表时间：
2023-02
影响因子：
4.9
通讯作者：
Gwenhivir Wyatt-Moon;G. Saravanavel;S. Sambandan;A. Flewitt
中科院分区：
文献类型：
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作者：
Gwenhivir Wyatt-Moon;G. Saravanavel;S. Sambandan;A. Flewitt
可生物降解和可食用电子产品将需要用于信号调制和无线通信的电子元件;因此，将需要非线性和高频元件。在这里，报道了一种在异麦芽酮糖醇（一种糖的替代品）基底上制备纳米二极管的方法。通过设计粘附光刻工艺，在异麦芽酮糖醇顶部制造具有纳米间隙分离的Al和Au的共面电极，以特别适应基板的低熔点和高溶解度。通过使用具有In 2 O3：Ga 2 O3：ZnO（1：1：1）的原子比的靶在电极的顶部上沉积铟镓锌氧化物（IGZO）而没有退火步骤来产生具有103的整流比的横向二极管。
Biodegradable and edible electronics will need electronic components for signal modulation and wireless communication; hence, non-linear and high frequency components will be required. Here, a method to fabricate nanodiodes on isomalt (a sugar substitute) substrates is reported. Coplanar electrodes of Al and Au with nanogap separation were fabricated on top of isomalt through design of an adhesion lithography process specifically to accommodate the low melting point and high solubility of the substrate. Lateral diodes with rectification ratios of 103 were created by depositing indium gallium zinc oxide (IGZO) using a target with an atomic ratio of In2O3:Ga2O3:ZnO (1:1:1) on top of the electrodes without an annealing step.