Miniature optical force levitation system
Miniature optical force levitation system
复制标题
DOI：
10.3788/col202220.013801
复制
发表时间：
2022-01
影响因子：
3.5
通讯作者：
Junji Pu;Kai Zeng;Yulie Wu;D. Xiao
中科院分区：
文献类型：
--
作者：
Junji Pu;Kai Zeng;Yulie Wu;D. Xiao
光悬浮技术是一种新型的微纳米粒子悬浮捕获技术。它利用光的机械效应，具有非接触、高灵敏度的特点。然而，传统的光学悬浮系统体积大，调节复杂，受外部环境影响大。提出了一种基于半导体激光器、微型透镜和微机电系统（MEMS）粒子腔的微型光悬浮系统。首先，我们分析了半导体激光器的输出光斑特性。通过比较不同类型半导体激光器的特性，确定了悬浮系统中半导体激光器的类型、波长和功率。然后，基于MEMS工艺制作了微粒子腔。MEMS工艺因其尺寸小、精度高、易于批量生产等优点，被广泛应用于微电子器件的制造中。采用这种方法加工的颗粒腔体既保证了体积小的优点，又具有较高的加工重复性。包括光源、聚焦透镜和MEMS腔体在内的整个封装的体积仅为Φ 10 mm×33 mm，据我们所知，这是目前报道的最小的光学悬浮系统。在整个悬浮系统设计和设置完成后，一个直径为10 µm的二氧化硅颗粒被稳定地捕获在大气环境中。最后，利用四象限光电探测器检测微位移和振动信号，以评估光学悬浮系统的刚度。
Optical levitation technology is a new levitation technology for trapping micro/nano-particles. By taking advantage of the mechanical effect of light, it has the characteristics of non-contact and high sensitivity. However, the traditional optical levitation system is large in volume, complex in adjustment, and greatly affected by the external environment. Herein, a miniature optical levitation system based on a laser diode, miniature lenses, and a micro-electro-mechanical system (MEMS) particles cavity is proposed. First, we analyze the output spot characteristics of the laser diode. Being compared the characteristics of different kinds of laser diodes, the type, wavelength, and power of diodes in the levitation system are determined. Then, the micro-particles cavity is fabricated based on the MEMS process. The MEMS process is widely used in the manufacturing of micro-electronic devices because of its advantages of small size, high precision, and easy mass production. The particle cavity processed in this way can not only ensure the advantage of small volume, but also possesses high processing repeatability. The volume of the entire package including the light source, focusing lenses, and MEMS cavity is just Φ 10 mm×33 mm, which is the smallest optical levitation system reported, to the best of our knowledge. After the entire levitation system is designed and set up, one silica particle of 10 µm diameter is stably trapped in the atmospheric environment. Finally, the micro-displacement and vibration signal are detected by a four-quadrant photoelectric detector to evaluate the stiffness of the optical levitation system.