Permeation and Outgassing of Vacuum Materials
Permeation and Outgassing of Vacuum Materials
复制标题
真空材料的渗透和放气
DOI：
10.1116/1.1318061
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发表时间：
1973
期刊：
影响因子：
--
通讯作者：
W. Perkins
中科院分区：
文献类型：
--
作者：
W. Perkins
综述了近年来有关真空材料气体渗透特性的文献。讨论和评价了测量气体在固体中的扩散率、渗透率和溶解度的实验技术，并描述了用于分析气固渗透数据的计算技术。讨论的材料包括不锈钢和可伐等合金；铜、镍、钼和钨等纯金属；耐火氧化物和陶瓷；有机材料如氟利昂、特氟龙和其他弹性体；以及层压金属材料。简要讨论了扩散率、渗透率和溶解度测量结果在某些真空材料的放气特性观测中的应用。
The recent literature dealing with the gas permeation characteristics of vacuum materials is reviewed. Experimental techniques for the measurement of gas diffusivity, permeability, and solubility in solids are discussed and evaluated, and computational techniques for the analysis of gas–solid permeation data are described. Materials discussed include alloys such as stainless steels and Kovar; pure metals such as copper, nickel, molybdenum, and tungsten; refractory oxides and ceramics; organic materials such as Viton, Teflon, and other elastomers; and laminated metal materials. Application of the results of diffusivity, permeability, and solubility measurements to the observed outgassing characteristics of some vacuum materials is discussed briefly.