A Novel Dual-Differential Edge Sensor Based on the Eddy Current Effect
A Novel Dual-Differential Edge Sensor Based on the Eddy Current Effect
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DOI：
10.1109/jsen.2023.3240175
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发表时间：
2023-03-15
影响因子：
4.3
通讯作者：
Ni, Jijun
中科院分区：
文献类型：
--
作者：
Yin, Jing;Zhao, Guofeng;Ni, Jijun
本文提出了一种基于涡流效应的边缘传感器，实现了大温度范围内纳米级分辨率的精确检测。与光学望远镜工程中使用的不同原理的边缘传感器相比，涡流边缘传感器具有对非目标方向不敏感和不受非铁磁介质影响的优点。所提出的双差分边缘传感器（DDES）通过取代互补对称安装方法，大大简化了其安装，并将传感器的支撑部件数量减少了一半。通过分析传感器的检测原理，设计了一种精确的解调电路和实时温度补偿方法，保证了传感器的超高稳定性。制造出传感器样机并进行验证，在300 μ m范围内分辨率可达2 nm以内，在-25℃至+25℃的大温度跨度下，温度漂移（TD）性能小于6 nm/℃。安装误差测量表明，当前结构具有优异的安装容差，在天文望远镜镜面拼接的工程应用中具有应用潜力。
In this article, a kind of edge sensor based on the eddy current effect is proposed to realize accurate detection of the nano-level resolution in a large temperature span. Compared with edge sensors with different principles used in optical telescope projects, eddy current edge sensor has the advantages of being insensitive to nontarget direction and immune to nonferromagnetic medium. The proposed dual-differential edge sensor (DDES) greatly simplifies its installation and reduces the number of support components for sensors to half by replacing the complementary symmetrical installation method. By analyzing the detection principle, a kind of precise demodulation circuit and realtime temperature compensation method is also designed to guarantee the sensor's ultrahigh stability. The prototype of the sensor is manufactured and verified that the resolution can reach within 2 nm in the range of 300 mu m, and the temperature drift (TD) performance is less than 6 nm/degrees C under the large temperature span from -25 degrees C to +25 degrees C. The installation error measurement convinced that the current structure has an excellent installation error tolerance, which has the potential to apply in the engineering application of astronomical telescope mirror splicing.