A silicon pressure sensor with a low-cost contactless interferometric optical readout
A silicon pressure sensor with a low-cost contactless interferometric optical readout
复制标题
具有低成本非接触式干涉光学读数的硅压力传感器
DOI：
10.1016/0924-4247(92)80125-m
复制
发表时间：
1992
影响因子：
4.6
通讯作者：
B. Hälg
中科院分区：
文献类型：
--
作者：
B. Hälg
一种新型的微型压力传感器的基础上的硅微膜与非电非接触读出其偏转的低成本的集成干涉光学手段（一个简单的“白”光源和一个特殊的单片光电探测器）已阐述。与众所周知的压阻或电容读出相比，非接触式光学方法即使在恶劣的环境和高温下也能提供绝对压力或压差的精确测量。初步的实验表明这种传感器的可行性。
A novel miniature pressure sensor based on a silicon micromembrane with non-electric contactless readout of its deflection by low-cost integrated interferometric optical means (a simple ‘white’-light source and a special single-chip photodetector) has been elaborated. In contrast to the well-known piezoresistive or capacitive readout, the contactless optical approach will provide accurate measurements of absolute or differential pressure even in severe environments and at elevated temperatures. Preliminary experiments performed show the feasibility of such a sensor.