Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?
Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?
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DOI：
10.1016/s0924-4247(01)00723-3
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发表时间：
2002-01-01
影响因子：
4.6
通讯作者：
Raj, R
中科院分区：
文献类型：
--
作者：
Liew, LA;Liu, YP;Raj, R
本文介绍了使用的液体聚硅氮烷的光聚合作为一种新颖的，通用的和具有成本效益的手段，制造SiCN陶瓷MEMS。SiCN是一类新型的聚合物衍生陶瓷，其起始材料是液相聚合物。通过将光引发剂添加到前体中，可以通过UV曝光来实现预陶瓷聚合物的光刻图案化。然后在等静压下使所得固体聚合物结构交联，并热解以形成能够承受超过1500摄氏度的无定形陶瓷。通过在彼此顶部上添加和固化连续的液体聚合物层，可以容易地制造多层陶瓷MEMS。光聚合的使用也可用于制造薄的膜状陶瓷结构。讨论了制作过程中的关键问题。通过结合光聚合与其他内部开发的技术，如基于聚合物的键合和倒装芯片键合，三个SiCN MEMS器件的高温应用，已制造：静电致动器，压力传感器，和燃烧室。这些代表了广泛的MEMS，证明了这种技术的多功能性。(C)2002 Elsevier Science B.V保留所有权利。
This paper describes the use of photopolymerization of a liquid polysilazane as a novel, versatile and cost-effective means of fabricating SiCN ceramic MEMS. SiCN is a new class of polymer-derived ceramics whose starting material is a liquid-phase polymer. By adding a photo initiator to the precursor, photolithographical patterning of the pre-ceramic polymer can be accomplished by UV exposure. The resulting solid polymer structures are then crosslinked under isostatic pressure, and pyrolyzed to form an amorphous ceramic capable of withstanding over 1500degreesC. By adding and curing successive layers of liquid polymer on top of one another, multi-layered ceramic MEMS can be easily fabricated. The use of photopolymerization can also be used to make thin, membrane-like ceramic structures. Key issues concerning the fabrication process are discussed. By combining photopolymerization with other in-house developed techniques such as polymer-based bonding and flip-chip bonding, three SiCN MEMS devices for high-temperature application,; have been fabricated: an electrostatic actuator, a pressure transducer, and a combustion chamber. These represent a wide range of MEMS, demonstrating the versatility of this technique. (C) 2002 Elsevier Science B.V All rights reserved.