Structure and soft magnetic properties of Fe-N thin films
Structure and soft magnetic properties of Fe-N thin films
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DOI：
10.1109/20.952756
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发表时间：
2001-09
影响因子：
2.1
通讯作者：
Jian‐Ping Zhou;Dan Li;Yousong Gu;X. Chang;Chun-sheng Zhao;Fu-shen Li;L. Qiao;Z. Tian;Guang-dan Fang;Qing-shan Song
中科院分区：
文献类型：
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作者：
Jian‐Ping Zhou;Dan Li;Yousong Gu;X. Chang;Chun-sheng Zhao;Fu-shen Li;L. Qiao;Z. Tian;Guang-dan Fang;Qing-shan Song
采用射频磁控溅射法在玻璃基片上制备了200 nm的Fe-N薄膜，在12000 A/m的磁场下，在250/spl deg/C ~ 350/spl deg/C的温度范围内进行了真空退火。热处理是提高Fe-N薄膜软磁性能的有效方法。当氮含量在5-7原子%范围内时，热处理后的薄膜由/spl α/“+/spl α/”组成，并具有优异的软磁性能：在2-10 MHz下，M/sub s/=2.4 T，H/sub c/<80 A/m，/spl mu//sub r/=1500。薄膜的性能满足双元件巨磁阻/电感磁头的磁头材料要求。
200-nm Fe-N thin films deposited on glass substrates by radio-frequency magnetron sputtering were vacuum annealed at 250/spl deg/C-350/spl deg/C under a 12000-A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was in the range of 5-7 atomic %, the thin films consisted of /spl alpha/'+/spl alpha/'' after heat treatment and had excellent soft magnetic properties: M/sub s/=2.4 T, H/sub c/<80 A/m, /spl mu//sub r/=1500 under 2-10 MHz. The properties of the films meet the needs of a write head material used in dual-element giant magnetoresistive/inductive heads.