Effects of the nonvanishing tip size in mechanical profile measurements
Effects of the nonvanishing tip size in mechanical profile measurements
复制标题
非消失尖端尺寸对机械轮廓测量的影响
DOI：
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发表时间：
1991
期刊：
影响因子：
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通讯作者：
P. Takacs
中科院分区：
文献类型：
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作者：
E. Church;P. Takacs
三维轮廓分析仪器的高空间频率行为主要是由触针尖端和表面不规则性之间的非线性几何相互作用决定的。 “人们对这种相互作用的本质及其在实际应用中的影响非常感兴趣。本文对这些问题进行了分析探讨，并给出了一系列结果，重点是频率-达南描述。光滑表面通过微扰理论进行处理，发现其因尖端尺寸效应而发生旋转，而粗糙表面则变得光滑。代替 rot4i 表面的紧密 fotm 结果，提供一个简单的猜想，描述尖端尺寸扭曲的性质和 rnaxinurn 可用的空间频率。
The high-spatial--fregiency behavior of rrethanical-profiling instrunents is determin principal ly by the non-linear geaitrica1 interaction beten the styl us tip and the surface irreularities. 'there is cons iderable interest in the nature of this interaction and its effects in practical applications. This paper explores the these issues analytically and pesents a riety of results with enphasis on the freuency-danain description. Smooth surfaces are treat1 by perturbation theory and are found to be rot4iened by tip-s ize effects , tiile rough surfaces are snoothed. In lieu of closel fotm results for rot4i surfaces, offer a simple conjecture rerding the nature of tip-s ize distortions and the rnaxinurn useable spatial freuenoj.