Thickness-Controlled Low-Temperature (~380°C) Solid-Phase Crystallization of Sn-Doped Poly-Ge/Insulator for High Carrier Mobility (~320 cm2/Vs)
Thickness-Controlled Low-Temperature (~380°C) Solid-Phase Crystallization of Sn-Doped Poly-Ge/Insulator for High Carrier Mobility (~320 cm2/Vs)
复制标题
锡掺杂多晶硅/绝缘体的厚度控制低温 (~380°C) 固相结晶,实现高载流子迁移率 (~320 cm2/Vs)
DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
and M. Miyao
中科院分区:
文献类型:
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作者:
K. Moto;T. Sadoh;Y. Kai;R. Matsumura;and M. Miyao