Micro-hotplates on polyimide for sensors and actuators
Micro-hotplates on polyimide for sensors and actuators
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DOI：
10.1016/j.sna.2006.06.003
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发表时间：
2006-11-08
影响因子：
4.6
通讯作者：
de Rooij, N. F.
中科院分区：
文献类型：
--
作者：
Briand, D.;Colin, S.;de Rooij, N. F.
在这篇文章中，我们介绍了在聚酰亚胺（PI）片和旋涂聚酰亚胺膜上制作的微型加热元件的制造和表征。不同类型的聚酰亚胺和加热器材料进行了研究，以实现气体传感和热驱动应用的微热板。使用的聚酰亚胺的类型和不同的退火进行的金属加热器的机械和电气性能的影响进行了表征。使用材料和工艺的优化组合，在聚酰亚胺片和硅上的聚酰亚胺膜上实现了柔性微热板，并对其热性能进行了评估。聚酰亚胺上的铂和铝微加热元件显示出其集成在低功耗气体传感器和热致动器的有前途的特性。(c)2006 Elsevier B.V.保留所有权利。
In this communication, we present the fabrication and the characterisation of micro-heating elements made on polyimide (Pl) sheets and on spin coated polyimide membranes. Different types of polyimide and heater materials were investigated to realise micro-hotplates for gas-sensing and thermal actuating applications. The effects of the type of polyimide used and of the different annealing performed on the mechanical and electrical properties of the metallic heaters were characterised. Using an optimised combination of materials and processes, flexible micro-hotplates on polyim ide sheets and on polyimide membranes on silicon were realised and their thermal properties evaluated. Platinum and aluminium microheating elements on polyimide exhibited promising characteristics for their integration in low-power gas sensors and thermal actuators. (c) 2006 Elsevier B.V. All rights reserved.