Shaped combs and parametric amplification in inertial MEMS sensors
Shaped combs and parametric amplification in inertial MEMS sensors
复制标题
惯性 MEMS 传感器中的成形梳和参数放大
DOI：
10.1109/icsens.2013.6688242
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
E. Cretu
中科院分区：
文献类型：
--
作者：
Mrigank Sharma;E. Sarraf;E. Cretu
在本文中，针对微位移的静电参量放大，对斜坡形梳进行了设计、建模和实验验证。应用于惯性传感器的参数共振技术需要周期性刚度调制，如马蒂厄方程所示，并且通常使用间隙变化和非重叠梳来实现。 MEMS 振动陀螺仪为传感和驱动模式提供了应用参数放大的机会。虽然间隙变化梳可有效用于小位移（例如传感模式），但较大位移需要不同的方法，其中斜坡形梳是一个不错的选择。建立了斜坡形梳的分析模型，并将其与所制造器件的实验特性进行了比较。分析模型预测，对于 10 V 至 40 V 施加的共模 DC 偏置，弹簧调制为 0.1%-0.65% 弹簧调制，并且可以针对更陡的斜率增加弹簧调制。使用面积变化梳上的线性差分电压驱动以及施加到左右形状梳的相位同步共模电压（使用 PXIe 1062Q DAQ 控制器）对参数放大操作进行实验测试。
In this paper slope-shaped comb are designed, modeled and experimentally verified for electrostatic parametric amplification of micro-displacements. Parametric resonance techniques applied to inertial sensors requires a periodic stiffness modulation, as expressed by the Mathieu equation, and is generally implemented using gap-varying and non-overlapping combs. MEMS vibratory gyroscopes provide the opportunity for applying parametric amplification for both the sensing and driving modes. While gap-varying combs are efficiently used for small displacements (e.g. the sensing mode), larger displacements require a different approach, where slope-shaped combs are a good alternative. Analytical model of slope shaped combs is carried out and compared with experimental characterization of fabricated devices. The analytical model predicts a spring modulation of 0.1%-0.65% spring modulation for 10 V to 40V applied common mode DC bias, and it can be increased for steeper slopes. The parametric amplification operation was experimentally tested using linear differential voltage actuation on the area-varying combs and a phase-synchronised common mode voltage (using a PXIe 1062Q DAQ controller) applied to the left and right shaped combs.