Reduced thermal conductivities of Si one-dimensional periodic structure and nanowire
Reduced thermal conductivities of Si one-dimensional periodic structure and nanowire
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DOI：
10.7567/jjap.53.06je09
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发表时间：
2014-06-01
影响因子：
1.5
通讯作者：
Nomura, Masahiro
中科院分区：
文献类型：
--
作者：
Maire, Jeremie;Nomura, Masahiro
制备了空气悬浮硅纳米线和一维声子晶体（PnC）纳米结构，并测量了每种结构的热导率。这些纳米结构是通过自上而下的方法，由145纳米厚的绝缘体上硅晶圆制备而成。这些纳米结构的热导率是通过一个基于时域热反射方法的全光学系统测量的，我们对该系统进行了调整以测量空气桥结构的特性。随着纳米线宽度因更频繁的表面散射而减小，热导率的降低清晰可见。一维PnC结构显示出出乎意料的低热导率，其远低于平均宽度与一维PnC纳米结构相同的纳米线的热导率。（C）2014日本应用物理学会
Air-suspended Si nanowires and one-dimensional (1D) phononic crystals (PnC) nanostructures were fabricated and the thermal conductivity for each structure was measured. The nanostructures were fabricated by a top-down approach from a 145-nm-thick silicon-on-insulator wafer. The thermal conductivities of these nanostructures were measured by an all-optical system based on the time domain thermoreflectance method that we adapted to measure the properties of air-bridge structures. The reduction in thermal conductivity was clearly observed as the width of the nanowire is decreased due to more frequent surface scattering. The 1D PnC structure showed an unexpectedly low thermal conductivity, which is much lower than that of a nanowire with the average width of 1D PnC nanostructure. (C) 2014 The Japan Society of Applied Physics