Reflow process using wax for fabricating curved shaped molds of PDMS microchannels and chambers
Reflow process using wax for fabricating curved shaped molds of PDMS microchannels and chambers
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DOI：
10.1016/j.mne.2020.100055
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发表时间：
2020-08-01
影响因子：
--
通讯作者：
Ukita, Yoshiaki
中科院分区：
文献类型：
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作者：
Okamoto, Shunya;Ukita, Yoshiaki
PDMS（聚二甲基聚硅氧烷）是一种在实验室中用于廉价制造微流体系统的材料[[1]，[2],[3],[4],[5],[6]]。PDMS微芯片是通过软光刻技术制造的，使用一种称为master的模具，一般为[7]。有一些众所周知的制造模具的工艺，如机器工艺。光刻技术是一种用于廉价制造高精度模具的工艺。光刻技术可用于制造发泡微通道的模具，其尺寸范围从亚微米到数百微米。图1显示了使用软光刻的PDMS微芯片的一般制造方法。利用光刻技术，可以通过进行多次旋转涂层和曝光[8]来制造形成多深度微通道的模具。然而，用多次曝光制造的模具几乎总是具有不连续步骤的微通道。在启动时，空气被无意地困在这些步骤中[9,10]，如图2 (a)所示。因此，这些步骤可能会在微流体系统中引起问题。
PDMS (Poly-dimethylpolysiloxane) is a material that has been used to inexpensively fabricate microfluidic systems in laboratories [[1],[2],[3],[4],[5],[6]]. PDMS microchips are fabricated via soft lithography using a mold called master, in general [7]. There are a few well-known processes for fabricating molds, such as the machine process. Photolithography is a process that has been used to inexpensively fabricate high accuracy molds. Photolithography be used to fabricate molds for foaming microchannels with sizes ranging from sub-micrometers to hundreds of micrometers. Fig. 1 shows a general fabrication method of a PDMS microchip using soft lithography. With photolithography, it is possible to fabricate molds which form multi depth microchannels by carrying out multiple spin coatings and exposure [8]. However, molds fabricated with multi exposure almost always have microchannels with discontinuous steps. Air is unintentionally trapped in these steps [9, 10] at priming, as shown in Fig. 2 (a). Hence, the steps can cause problems in microfluidic systems.