Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source
Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source
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DOI：
10.1364/oe.19.022470
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发表时间：
2011-11-07
期刊：
影响因子：
3.8
通讯作者：
Murnane, Margaret M.
中科院分区：
文献类型：
--
作者：
Seaberg, Matthew D.;Adams, Daniel E.;Murnane, Margaret M.
使用相干 X 射线束的新型衍射成像技术通过用迭代相位检索算法取代显微镜中的光学器件，使纳米级分辨率成像成为可能。然而，迄今为止，极高分辨率成像（< 40nm）仅限于大型同步加速器设施。在这里，我们展示了桌面软 X 射线显微镜在图像分辨率和功能方面的重大进步，这将使纳米科学和纳米技术领域得到广泛应用。使用 13 nm 高次谐波光束，我们展示了任何台式 X 射线显微镜创纪录的 22 nm 空间分辨率。最后，我们表明可以通过在非常高的数值孔径下提取 3D 信息来获得有关样本的独特信息。 (C)2011 美国光学学会
New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13nm high harmonic beams, we demonstrate a record 22nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures. (C)2011 Optical Society of America