3D fiber probe: State of the art and new developments

3D fiber probe: State of the art and new developments
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3D 光纤探头：最先进的技术和新发展

DOI：
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发表时间：
2012
期刊：
International Symposium on Optomechatronic Technologies
影响因子：
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通讯作者：
M. Andras
M. Andras
中科院分区：
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文献类型：
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作者：
S. Linz;A. Schoch;C. Bach;A. Ettemeyer;B. Hopp;M. Andras

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不断提高的制造精度要求迫使创新和高灵敏度测量工具的开发。光纤探头将经典的触觉测量与光学读数相结合。这些探头允许极小的接触力，并且比千分尺更好地达到测量不确定度。为了进一步降低这些值，正在开发一种基于干涉测量的新测量原理。
Increasing manufacturing accuracy requirements enforce the development of innovative and highly sensitive measuring tools. Fiber probes combine classical tactile measurement with optical read out. These probes allow extremely small contact force and reach measurement uncertainties better than a micrometer. To even further reduce these values, a new measuring principle based on interferometry is being developed.