Tsukahara, S., Hara, K., Tomita, Y., Isobe, S., Kanai, A., Miyashita, M: "Development of Nanometer Positioning System Driven by Force Operational Water Hydraulic Actuator with Rigid Slide Guide-way"Proceedings of the 16^<th> Annual Meeting of The American
Tsukahara, S., Hara, K., Tomita, Y., Isobe, S., Kanai, A., Miyashita, M: "Development of Nanometer Positioning System Driven by Force Operational Water Hydraulic Actuator with Rigid Slide Guide-way"Proceedings of the 16^<th> Annual Meeting of The American
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Tsukahara, S.、Hara, K.、Tomita, Y.、Isobe, S.、Kanai, A.、Miyashita, M:“开发具有刚性滑动导轨的力操作水液压执行器驱动的纳米定位系统”论文集
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