Electrochemical micromachining of passive electrodes

Electrochemical micromachining of passive electrodes
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DOI:
10.1016/j.electacta.2013.07.139
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发表时间:
2013-10
影响因子:
6.6
通讯作者:
R. Sueptitz;P. Dunne;K. Tschulik;M. Uhlemann;J. Eckert;A. Gebert
R. Sueptitz;P. Dunne;K. Tschulik;M. Uhlemann;J. Eckert;A. Gebert
中科院分区:
材料科学2区
文献类型:
--
作者:
R. Sueptitz;P. Dunne;K. Tschulik;M. Uhlemann;J. Eckert;A. Gebert

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讨论了利用透溶法对无源电极进行电化学微加工的电子模型。通过测量由钨制工具电极、1 M h2so4电解液和不锈钢工件电极组成的模型系统的电化学性能,对加工模型电路进行了数值模拟。采用同一模型系统进行加工实验,验证了仿真结果。对于钝化不锈钢电极,可以像具有高反应过电位的主动溶解电极一样处理。在靠近传递电位区域的钢工件电极处进行极化,可以提高加工效率。讨论了实现这种极化的三种不同方法:仅对工件电极进行极化,对两个电极进行极化以及向电解质溶液中添加氧化物质。
The electronic model describing the electrochemical micromachining (ECMM) of passive electrodes utilizing the transpassive dissolution is discussed. Numerical simulations are performed on a machining model circuit using measured electrochemical properties of the model system which consisted of a tungsten tool electrode, a 1 M H2SO4electrolyte and a stainless steel work piece electrode. The results of these simulations were verified by performing machining experiments applying the same model system. For a passive stainless steel electrode it is shown that it can be treated like an actively dissolving electrode with high reaction overpotential. The efficiency of the machining process can be enhanced by polarizing the steel work piece electrode close to the transpassive potential region. Three different ways of achieving this polarization are discussed: by polarizing the work piece electrode only, by polarizing both electrodes and by adding oxidizing species to the electrolyte solution.