Move the Laser Spot, Not the DUT: Investigating the New Micro-mirror Capability and Challenges for Localizing SEE Sites on Large Modern ICs
Move the Laser Spot, Not the DUT: Investigating the New Micro-mirror Capability and Challenges for Localizing SEE Sites on Large Modern ICs
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移动激光点，而不是 DUT：研究在大型现代 IC 上本地化 SEE 站点的新微镜功能和挑战
DOI：
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
M. Wirthlin
中科院分区：
文献类型：
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作者：
M. Cannon;Andrés Pérez;G. Swift;R. Wong;S. Wen;M. Wirthlin
针对单粒子效应的小光斑激光测试已被证明是一种特别有效的途径，可以深入了解电荷收集和电路响应的物理特性，而这些特性很难或不可能通过广泛的离子束测试获得。因此，有许多这样的激光设备;例如，2012年比较了其中的四个[1]，但是萨斯喀彻温大学的一个相对较新的设备除了通常的基于微米的DUT运动平台之外，还提供了独特的振镜激光光斑扫描能力[2]。以类似于LASIX眼科手术的方式操作，激光束的快速点重定向使得毫米尺寸视场的全面扫描易于处理（秒，而不是小时或天）。结合自动步进视场，这种新的点扫描功能开辟了全面覆盖大型芯片并找到所有SEE位置的可能性，包括罕见但重要的SEFI。
Small spot size laser testing for single-event effects has proven to be a particularly productive path to insights on the physics of charge collection and circuit response that are difficult or impossible to obtain through broad ion beam tests. As a result, there are a number of such laser facilities; for example, four of them were compared in 2012 [1], but a relatively new facility at the facility at the University of Saskatchewan offers a unique galvo-mirror, laser-spot scanning capability in addition to the usual micrometer-based DUT motion stage [2]. Operating in a fashion similar to LASIX eye surgery, fast pin-point redirection of the laser beam makes tractable (seconds, not hours or days) comprehensive scanning of a millimeter size field-of-view. Combined with auto-stepping the field-of-view, this new spot scanning capability opens up the possibility of comprehensively covering a large die and finding all SEE sites, including the rare, but important, ones such as SEFIs.