Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture
Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture
复制标题
CVD金刚石膜与硅基体界面断裂韧性与源气体混合物中甲烷浓度的关系
DOI：
10.1016/s0925-9635(00)00608-7
复制
发表时间：
2001
影响因子：
4.1
通讯作者：
H. Abé
中科院分区：
文献类型：
--
作者：
Hironori Takahashi;S. Kamiya;M. Saka;H. Abé
