Development of a dual-axis thermal convective gas gyroscope
Development of a dual-axis thermal convective gas gyroscope
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DOI：
10.1088/0960-1317/16/7/026
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发表时间：
2006-07-01
影响因子：
2.3
通讯作者：
Sugiyama, Susumu
中科院分区：
文献类型：
--
作者：
Dau, Van Thanh;Dao, Dzung Viet;Sugiyama, Susumu
本文介绍了一种双轴气体陀螺仪的研制，其工作原理是基于对流传热和轻掺杂硅的热阻效应。分析了气体陀螺的工作原理和交叉灵敏度。通过实验验证了仿真结果的正确性. X轴和Y轴的测量灵敏度分别为0.107 mV deg（-1）s（-1）和0.102 mV deg（-1）s（-1）。与同样结构但使用钨作为传感元件的陀螺仪相比，该陀螺仪的灵敏度高出42倍，功耗仅为四分之一。这些有利的特性是从轻掺杂p型硅的高TCR和高电阻继承的。非线性和交叉灵敏度分别小于0.07%FS和0.5%FS。加速度对灵敏度的影响为0.02（deg s（-1））/g，基于灵敏度和噪声分析的测量分辨率为0.05 deg s（-1）。同时，分析了传感器性能、功耗与环境温度之间的关系.
This paper presents the development of a dual-axis gas gyroscope, whose working principle is based on the convective heat transfer and thermoresistive effect of lightly doped silicon. The working principle and the cross-sensitivity of the gas gyroscope are also analyzed. Experiments were performed to confirm the simulation results and good agreement has been achieved. The measured sensitivities for the X-axis and Y-axis were 0.107 mV deg(-1) s(-1) and 0.102 mV deg(-1) s(-1), respectively. Compared with a gyroscope of the same configuration but using tungsten as a sensing element, this gyroscope has 42 times greater sensitivity and one quarter the power consumption. These advantageous characteristics are inherited from the high TCR and high resistance of lightly doped p-type silicon. Nonlinearity and cross-sensitivity were measured to be smaller than 0.07% FS and 0.5% FS, respectively. The effect of acceleration on the sensitivity is 0.02 (deg s(-1))/g and the measurement resolution based on sensitivity and noise analyses is 0.05 deg s(-1). The relations between sensor performance, power consumption and ambient temperature were also realized.