INTEGRATED-OPTIC RING RESONATORS WITH 2 STACKED LAYERS OF SILICA WAVE-GUIDE ON SI
INTEGRATED-OPTIC RING RESONATORS WITH 2 STACKED LAYERS OF SILICA WAVE-GUIDE ON SI
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DOI：
10.1109/68.166960
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发表时间：
1992-11-01
影响因子：
2.6
通讯作者：
HIBINO, Y
中科院分区：
文献类型：
--
作者：
SUZUKI, S;SHUTO, K;HIBINO, Y
一个半径为1.5 mm的环形谐振腔的演示使用的堆叠结构，由两层不同的折射率差（DELTA）的GeO 2掺杂的二氧化硅波导。一种是用于小半径环的具有2%的DELTA的高DELTA波导层，另一种是用于良好光纤耦合的具有0.75%的DELTA的波导层。波导和平坦的中间包层堆叠在Si衬底上。环形谐振器具有21.6 +/- 0.1 GHz的宽自由光谱范围（FSR）和110 +/- 10的高精细度。
A ring resonator with a radius of 1.5 mm is demonstrated using a stack structure consisting of two layers of GeO2-doped silica waveguide with different refractive index differences (DELTA). One is a high-DELTA waveguide layer with a DELTA of 2% for a small-radius ring and the other is a waveguide layer with a DELTA of 0.75% for good fiber coupling. The waveguides and a flattened middle-cladding layer are stacked on a Si substrate. The ring resonator exhibited a wide free spectral range (FSR) of 21.6 +/- 0.1 GHz and a high finesse of 110 +/- 10.