Effect of Driving Frequency on the Electron Energy Probability Function of Capacitively Coupled Argon Plasmas Comparison between Simulation and Experiment
Effect of Driving Frequency on the Electron Energy Probability Function of Capacitively Coupled Argon Plasmas Comparison between Simulation and Experiment
复制标题
驱动频率对电容耦合氩等离子体电子能量概率函数的影响仿真与实验对比
DOI：
10.1143/jjap.43.3590
复制
发表时间：
2004
影响因子：
1.5
通讯作者：
K. Nanbu
中科院分区：
文献类型：
--
作者：
H. Takekida;K. Nanbu
采用粒子模拟/蒙特卡罗（PIC/MC）方法研究了13-50 MHz范围内驱动频率对电容耦合放电中电子能量概率函数（EEPF）的影响。模拟得到的EEPFs与Abdel-Fattah和Sugai的实测数据基本吻合。然而，详细的比较表明，从Druyvesteyn分布的双Maxiwellian类型的过渡与驱动频率的增加是不清楚的模拟实验中。
The effect of driving frequency in the range of 13–50 MHz on the electron energy probability function (EEPF) in capacitively coupled discharges is studied using particle-in-cell/Monte Carlo(PIC/MC) method. The EEPFs obtained from the simulation generally agree well with the measured data of Abdel-Fattah and Sugai. Detailed comparison shows, however, that the transition from the Druyvesteyn distribution to the bi-Maxiwellian type with increasing driving frequency is not as clear in the simulation as in the experiment.