Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron
Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron
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DOI：
10.1103/physreve.61.1904
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发表时间：
2000-02
期刊：
影响因子：
--
通讯作者：
Wang;Cohen;Ruzic;Goeckner
中科院分区：
文献类型：
--
作者：
Wang;Cohen;Ruzic;Goeckner
利用发射光谱法获得了空心阴极平面溅射磁控管中氮原子的能量分布。鉴定出一条与分子氮发射带分离较好的特征线ni 8216.3 A。采用最小化chi(2)(w)的Jansson非线性谱反卷积方法，得到最优解卷积谱。氮原子能量从1ev到500ev以上。通过与VFTRIM计算机代码结果的比较，提出高能N是由N+2离子加速穿过鞘层并从阴极解离反射后产生的。
Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 A, well separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of chi(2)(w), was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N's are generated from N+2 ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.