1.14-GHz self-aligned vibrating micromechanical disk resonator
1.14-GHz self-aligned vibrating micromechanical disk resonator
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DOI：
10.1109/rfic.2003.1213956
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发表时间：
2003-06
期刊：
影响因子：
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通讯作者：
Jing Wang;Z. Ren;C. Nguyen
中科院分区：
文献类型：
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作者：
Jing Wang;Z. Ren;C. Nguyen
微机械径向轮廓模盘谐振器具有新的自对准杆件，其记录共振频率高达1.14 GHz，并在此频率下在真空和空气中测量了Q；1500。此外，733-MHz版本已经展示，在真空和空气中Q分别为7,330和6,100。对于这些谐振器，杆与其所支持的盘的中心的精确对齐允许谐振器的平衡远远优于以前的版本(其中使用单独的掩膜来定义盘和杆)，允许本设备保持高Q，同时首次实现GHz范围内的频率。除了提供测量结果外，本文还建立了一个等效电路模型，准确地预测了这种圆盘谐振器的性能。
Micromechanical radial-contour mode disk resonators featuring new self-aligned stems have been demonstrated with record resonance frequencies up to 1.14 GHz and measured Q's at this frequency >1,500 in both vacuum and air. In addition, a 733-MHz version has been demonstrated with Q's of 7,330 and 6,100 in vacuum and air, respectively. For these resonators, self-alignment of the stem to exactly the center of the disk it supports allows balancing of the resonator far superior to that achieved by previous versions (where separate masks were used to define the disk and stem), allowing the present devices to retain high Q while achieving frequencies in the GHz range for the first time. In addition to providing measured results, this paper formulates an equivalent electrical circuit model that accurately predicts the performance of this disk resonator.