Real-time heterodyne imaging interferometry: focal-plane amplitude and phase demodulation using a three-phase correlation image sensor.
Real-time heterodyne imaging interferometry: focal-plane amplitude and phase demodulation using a three-phase correlation image sensor.
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DOI：
10.1364/ao.46.000087
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发表时间：
2007
期刊：
影响因子：
1.9
通讯作者：
A. Kimachi
中科院分区：
文献类型：
--
作者：
A. Kimachi
提出了一种利用三相相关图像传感器（3PCIS）的实时外差成像干涉测量方法。它以普通帧速率同时解调入射干涉图案的幅度和相位图像，具有良好的精度，从而克服了传统干涉测量中测量时间、空间分辨率和解调精度之间的权衡。实验系统由以 30 帧/秒运行的 64x64 3PCIS 相机和拍频为 25 kHz 的双频氦氖激光器构建。扫描镜和加热硅油获得的结果证实了所提出的方法。
A method of real-time heterodyne imaging interferometry using a three-phase correlation image sensor (3PCIS) is proposed. It simultaneously demodulates the amplitude and phase images of an incident interference pattern at an ordinary frame rate with good accuracy, thus overcoming the trade-off among measurement time, spatial resolution, and demodulation accuracy suffered in conventional interferometry. An experimental system is constructed with a 64x64 3PCIS camera operated at 30 frames/s and a two-frequency He-Ne laser with a beat frequency of 25 kHz. The results obtained for a scanning mirror and heated silicone oil confirm the proposed method.