Assessment of acid and thermal oxidation treatments for removing sp2 bonded carbon from the surface of boron doped diamond
Assessment of acid and thermal oxidation treatments for removing sp2 bonded carbon from the surface of boron doped diamond
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DOI：
10.1016/j.carbon.2020.04.095
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发表时间：
2020-10-15
期刊：
影响因子：
10.9
通讯作者：
Macpherson, Julie V.
中科院分区：
文献类型：
--
作者：
Cobb, Samuel J.;Laidlaw, Fraser H. J.;Macpherson, Julie V.
由于生长或加工，金刚石或掺杂金刚石表面上sp（2）键合碳的存在会对材料性能产生负面影响，因此必须开发去除工艺。使用掺硼金刚石（BDD），我们通过电化学和透射电子显微镜研究不同的去除方法的有效性。我们专注于两个BDD表面，一个由ns激光微加工处理，第二个包含sp（2）键合碳作为化学气相沉积（CVD）生长的结果。在微机械加工后，一层有序的石墨位于BDD表面上，顶部是有裂缝的无定形碳（总厚度约为μ m）。高温下的氧化酸处理不能除去所有的sp（2）键合碳和更小的垂直取向的石墨簇（直径为数十nm），覆盖有我们称之为“变性石墨”的更薄的无定形碳层。相比之下，在空气中在600摄氏度下的热氧化能够去除所有簇，并且还可以用于从生长的CVD BDD中去除sp（2）键合的碳。这种理解对于任何应用都是重要的，其中由CVD生长或激光处理产生的sp（2）键合的表面碳对于预期的应用是有害的，例如在金刚石量子技术、光子学和电化学中。(C)2020爱思唯尔有限公司保留所有权利。
The presence of sp(2) bonded carbon on a diamond or doped diamond surface, as a result of growth or processing, can affect material properties negatively, hence removal processes must be developed. Using boron doped diamond (BDD) we investigate the effectiveness of different removal methods via electrochemistry and transmission electron microscopy. We focus on two BDD surfaces, one processed by ns laser micromachining and the second which contains sp(2) bonded carbon as a result of chemical vapour deposition (CVD) growth. After micromachining a layer of ordered graphite sits on the BDD surface, topped by fissured amorphous carbon (total thickness similar to mu m). Oxidative acid treatment at elevated temperature cannot remove all the sp(2) bonded carbon and much smaller clusters of perpendicularly orientated graphite (tens of nm in diameter), capped with a thinner layer of amorphous carbon that we term "denatured graphite" remain. In contrast, thermal oxidation in air at 600 degrees C is capable of all cluster removal, and can also be used to remove sp(2) bonded carbon from as-grown CVD BDD. Such understanding is important to any application where sp(2) bonded surface carbon resulting from CVD growth or laser processing is detrimental for the intended application, e.g. in diamond quantum technology, photonics and electrochemistry. (C) 2020 Elsevier Ltd. All rights reserved.