Texture evolution and microstructural changes during solid-state dewetting: A correlative study by complementary in situ TEM techniques
Texture evolution and microstructural changes during solid-state dewetting: A correlative study by complementary in situ TEM techniques
复制标题
DOI：
10.1016/j.actamat.2016.05.026
复制
发表时间：
2016-08-15
期刊：
影响因子：
9.4
通讯作者：
Spiecker, Erdmann
中科院分区：
文献类型：
--
作者：
Niekiel, Florian;Kraschewski, Simon M.;Spiecker, Erdmann
在低于大块材料熔点的温度下，薄膜转变成一组能量有利的粒子被称为固态脱湿。在这项工作中，利用互补的原位透射电子显微镜技术，利用基于芯片的加热系统的独特能力，定量研究了16 nm厚的不连续金薄膜在非晶氮化硅膜上的脱湿行为。采用专用成像技术和衍射技术相结合的方法研究了脱湿过程中晶粒生长和织构演化的相互作用。结果表明，在其他过程发生之前，合金的微观组织发生了初始粗化。在随后的脱湿过程中，织构演化与材料缩回和团聚密切相关。已经观察到面内晶粒旋转，作为取向变化的附加机制。从方法学的角度来看，这项工作展示了当今透射电子显微镜与最先进的原位仪器相结合的能力。特别是将来自不同专用技术的互补信息组合在一个和相同的设置中被证明是非常有益的。(C) 2016材料学报Elsevier Ltd.出版。版权所有。
The transition of a thin film into an energetically favorable set of particles at temperatures below the melting point of the bulk material is known as solid-state dewetting. In this work the dewetting behavior of 16 nm thick discontinuous Au thin films on amorphous silicon nitride membranes is quantitatively studied by complementary in situ transmission electron microscopy techniques taking advantage of the unique capabilities of a chip-based heating system. The combination of dedicated imaging and diffraction techniques is used to investigate the interplay of grain growth and texture evolution with the process of dewetting. The results show an initial coarsening of the microstructure preceding the other processes. Texture evolution is highly correlated to material retraction and agglomeration during the following dewetting process. In-plane grain rotation has been observed, acting as an additional mechanism for orientation changes. From a methodological perspective this work demonstrates the capabilities of today's transmission electron microscopy in combination with state-of-the-art in situ instrumentation. In particular the combination of complementary information from different dedicated techniques in one and the same setup is demonstrated to be highly beneficial. (C) 2016 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.