MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)
MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (μ-DMFC)
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DOI：
10.1016/j.elecom.2004.04.007
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发表时间：
2004-06
影响因子：
5.4
通讯作者：
S. Motokawa;M. Mohamedi;T. Momma;S. Shoji;T. Osaka
中科院分区：
文献类型：
--
作者：
S. Motokawa;M. Mohamedi;T. Momma;S. Shoji;T. Osaka
设计了一种有效面积为0.018cm2的微型直接甲醇燃料电池（μ-DMFC）。采用光刻、深反应离子刻蚀和电子束沉积等工艺，从微加工硅片上制备了μ-DMFC。这种结构的新奇在于，我们制作了阳极和阴极微通道排列在平面上，不同于传统的双极结构。实验的第一个目的是验证这种基于MEMS技术的新型结构的可行性。初步测试结果表明，这种新概念的μ-DMFC能够正常发电。
A design for a novel micro direct methanol fuel cell (μ-DMFC) of 0.018 cm2active area is described. The μ-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept μ-DMFC generates electricity.