Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties
Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties
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脉冲激光沉积离子轰击制备的类金刚石碳：物理性质
DOI：
10.1007/s00339-017-1501-5
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
M. Jelínek
中科院分区：
文献类型：
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作者：
P. Písařík;J. Miksovsky;J. Remsa;J. Zemek;Z. Tolde;M. Jelínek
采用脉冲激光沉积、离子源(轰击)和磁控溅射相结合的方法制备了类金刚石(DLC)薄膜和掺钛类金刚石薄膜。研究了沉积参数(离子能量、沉积压力和磁控功率)对薄膜成分和物理性能的影响。用X射线光电子能谱(XPS)测定了样品的成分和sp3/sp2比，未掺杂DLC的sp3/sp2比在1.4~2.2之间，而Ti-DLC的sp3/sp2比在3.4~4.8之间。AFM显示，薄膜表面光滑，但有少量的随机液滴。测定了水、二碘甲烷和乙二醇的接触角和表面自由能。硬度和折合杨氏模数分别为20~31 GPa和182~276 GPa.通过划痕试验测定薄膜附着力，DLC和TiDLC的LC_3分别达到230N和270N。优化的sp3/sp2比例、硬度和与生物医用合金的附着力将提高DLC涂层在种植学领域的可用性。
Diamond-like carbon (DLC) and titanium-doped DLC thin films were prepared by unique hybrid system consisting of pulsed laser deposition, ion source (bombardment) and magnetron sputtering. The influence of deposition parameters (ion energies, deposition pressures and magnetron power) on composition and physical properties was studied. Composition andsp3/sp2ratio were determined by XPS.sp3/sp2ratio was in the range from 1.4 to 2.2 for undoped DLC and from 3.4 to 4.8 for Ti-DLC. AFM showed that the layers were smooth, but with small amounts of random droplets. The measurements of the contact angle and determination of surface free energy were made for water, diiodomethane and ethylene glycol. Hardness and reduced Young’s modulus varied from 20 to 31 GPa and from 182 to 276 GPa, respectively. Film adhesion was determined by scratch test;LC3reached 23 N for DLC and 27 N for TiDLC. Optimization ofsp3/sp2ratio, hardness and adhesion to biomedical alloys will advance the DLC coatings usability in the field of implantology.