Pairing electrostatic levitation with triboelectric transduction for high-performance self-powered MEMS sensors and actuators
Pairing electrostatic levitation with triboelectric transduction for high-performance self-powered MEMS sensors and actuators
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DOI：
10.1063/1.5119814
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发表时间：
2019-09
影响因子：
4
通讯作者：
Mark Pallay;Alwathiqbellah Ibrahim;R. Miles;Shahrzad Towfighian
中科院分区：
文献类型：
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作者：
Mark Pallay;Alwathiqbellah Ibrahim;R. Miles;Shahrzad Towfighian
我们证明了静电悬浮微机电系统（MEMS）开关可以通过施加机械压力的摩擦发电机。开关的切换机制不汲取电流，但需要高致动电压，而发电机可以提供高电压，但仅产生微瓦功率。这种协同组合产生了完全自供电的传感器和开关;常闭MEMS开关可以通过向发生器施加阈值力来切换打开，而不需要任何外部电源或辅助电路。MEMS开关和静电力的模型与实验数据进行了验证。通过实验获得了该发电机的输出电压与输入力的关系，证明了通过对摩擦发电机施加机械压力，可以实现静电悬浮微机电系统（MEMS）开关的工作。开关的切换机制不汲取电流，但需要高致动电压，而发电机可以提供高电压，但仅产生微瓦功率。这种协同组合产生了完全自供电的传感器和开关;常闭MEMS开关可以通过向发生器施加阈值力来切换打开，而不需要任何外部电源或辅助电路。MEMS开关和静电力的模型与实验数据进行了验证。实验提取了发电机的输出电压与输入力的关系。
We demonstrate that an electrostatic levitation microelectromechanical systems (MEMS) switch can be operated by applying mechanical pressure to a triboelectric generator. The toggling mechanism of the switch draws no current but requires a high actuating voltage, while the generator can supply a high voltage but only produces microwatts of power. The synergistic combination results in an entirely self-powered sensor and switch; the normally closed MEMS switch can be toggled open by applying a threshold force to the generator without the need for any outside power or supplementary circuitry. A model of the MEMS switch and electrostatic force is validated with experimental data. An output voltage vs input force relationship for the generator is experimentally extracted.We demonstrate that an electrostatic levitation microelectromechanical systems (MEMS) switch can be operated by applying mechanical pressure to a triboelectric generator. The toggling mechanism of the switch draws no current but requires a high actuating voltage, while the generator can supply a high voltage but only produces microwatts of power. The synergistic combination results in an entirely self-powered sensor and switch; the normally closed MEMS switch can be toggled open by applying a threshold force to the generator without the need for any outside power or supplementary circuitry. A model of the MEMS switch and electrostatic force is validated with experimental data. An output voltage vs input force relationship for the generator is experimentally extracted.