Development of velocity sensor with high frequency band and its application to a vibration isolate table
Development of velocity sensor with high frequency band and its application to a vibration isolate table
复制标题
高频段速度传感器的研制及其在隔振台上的应用
DOI：
10.1016/j.precisioneng.2006.05.004
复制
发表时间：
2007
影响因子：
3.6
通讯作者：
Masato Takahashi
中科院分区：
文献类型：
--
作者：
S. Wakui;Azusa Noda;Takeshi Akiyama;Masato Takahashi
振动传感器广泛应用于振动控制和测量领域。在将现代控制理论应用于抗振被控对象时，速度和位移这两个状态变量都成为有用的信号。然后，速度传感器与加速度传感器相比，这是在普遍使用，是非常有用的。然而，由于电刚度的原因，其频带受到高频共振的限制。如果研制出平坦频带速度传感器，不仅在控制领域，而且在测量领域都将变得易于操作。然后，本文表明，在闭环中插入反陷波滤波器，使原本具有高频共振的频率响应平坦化。首先，给出了速度传感器作为封闭系统的框图。给出了其灵敏度、低断点频率和高频共振的公式。其次，计算了增益和相位裕度，并在此基础上改进了频率响应。最后，介绍了改进速度传感器在减振装置中的应用。
The vibration sensors are widely used in the field of vibration control and measurement. In applying the modern control theory to anti-vibration controlled objects, the state variables both the velocity and displacement become useful signals. Then, the velocity sensor in comparison with the acceleration sensor, which is in generally used, is very useful. However, its frequency band is limited by high frequency resonance due to the electrical stiffness. If the velocity sensor having flat frequency band is developed, this sensor becomes easy to handle not only in the control field but also in the measurement filed. Then, this paper shows that the inverse notch filter, which is inserted in the closed loop, flattens out the frequency response originally having high frequency resonance. Firstly, the block diagram of the velocity sensor as a closed system is shown. Its sensitivity, the low break point frequency, and the high frequency resonance are formulated. Secondly, the gain and phase margins are calculated and we try to improve the frequency response based on these indices. Finally, the application of improved velocity sensor to an anti-vibration apparatus is shown.