Structural analysis of a (Pt/Co)3/IrMn multilayer: Investigation of sub-nanometric layers by tomographic atom probe
Structural analysis of a (Pt/Co)3/IrMn multilayer: Investigation of sub-nanometric layers by tomographic atom probe
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(Pt/Co)3/IrMn 多层结构分析：通过断层扫描原子探针研究亚纳米层
DOI：
10.1063/1.3106636
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发表时间：
2009
影响因子：
3.2
通讯作者：
B. Dieny
中科院分区：
文献类型：
--
作者：
R. Lardé;L. Lechevallier;A. Zarefy;A. Bostel;J. Juraszek;J. L. Breton;B. Rodmacq;B. Dieny
用X射线反射仪和激光辅助层析原子探针研究了具有垂直交换偏置的Ta3 nm/[(Pt2 nm/Co0 4 nm)3/IrMn7 nm]7/Pt10 nm多层膜的结构。X射线反射仪表明，Co/IrMn界面存在较强的混合，该界面比IrMn/Pt界面弥散得更明显。多亏了真实空间中的LATAP，才能在原子尺度上直接观察到这种混合。三维重构揭示了铂多层中的原子平面和(铂/钴)3多层中的铂-钴混合。对浓度分布的分析可以确定钴亚纳米层的化学成分，从而首次提供这种层的准确结构特征，从而估计其厚度、粗糙度、原子浓度和界面宽度。
The structure of a Ta3 nm/[(Pt2 nm/Co0.4 nm)3/IrMn7 nm]7/Pt10 nm multilayer exhibiting perpendicular exchange bias has been investigated by x-ray reflectometry and laser-assisted tomographic atom probe (LATAP). A strong intermixing at the Co/IrMn interface is pointed out by x-ray reflectometry, this interface being more diffuse than the IrMn/Pt interface. A direct observation of this intermixing at the atomic scale is obtained thanks to the LATAP in real space. The three-dimensional reconstructions reveal the atomic planes in the Pt layers and the Pt–Co intermixing in the (Pt/Co)3 multilayer. The analysis of the concentration profiles allows to determine the chemical composition of the Co subnanometric layers; thus providing for the first time an accurate structural characterization of such layers leading to an estimation of their thickness, roughness, atomic concentration and width of their interfaces.