Focused ion beam ring drilling for residual stress evaluation
Focused ion beam ring drilling for residual stress evaluation
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DOI：
10.1016/j.matlet.2009.06.020
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发表时间：
2009-09-15
影响因子：
3
通讯作者：
Bemporad, Edoardo
中科院分区：
文献类型：
--
作者：
Korsunsky, Alexander M.;Sebastiani, Marco;Bemporad, Edoardo
聚焦离子束（FIB）铣削环形沟槽（环形钻孔）在残余应力样品表面引起可控的逐渐应变释放，中心“岛”接近无应力状态。在钻环之前，通过对沉积在样品表面的规则点的SEM显微照片进行数字图像相关分析，测量了样品表面的应变变化。应变随钻环深度变化的有限元模拟与实验结果吻合。所提出的技术比以前的尝试有了很大的改进。建立了一种在亚微米尺度上精确评估残余应力的有效半破坏方法。(C) 2009 Elsevier B.V.版权所有
Focused Ion Beam (FIB) milling of ring-shaped trenches (ring drilling) induces controlled gradual strain relief at the surface of residually stressed samples, with the central "island" approaching the unstressed state. Strain change was measured at sample surface via Digital Image Correlation analysis of SEM micrographs of a regular pattern of dots deposited on the sample surface prior to ring drilling. FE modeling of strain evolution with ring drilling depth agrees with experimental observations. The technique proposed represents a substantial improvement over prior attempts. constituting an efficient semi-destructive method for accurate residual stress evaluation at the (sub)micron scale. (C) 2009 Elsevier B.V. All rights reserved.