Fabrication of deep micro-holes in reaction-bonded SiC by ultrasonic cavitation assisted micro-EDM
Fabrication of deep micro-holes in reaction-bonded SiC by ultrasonic cavitation assisted micro-EDM
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DOI：
10.1016/j.ijmachtools.2013.09.010
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发表时间：
2014-01-01
影响因子：
14
通讯作者：
Kuriyagawa, Tsunemoto
中科院分区：
文献类型：
--
作者：
Liew, Pay Jun;Yan, Jiwang;Kuriyagawa, Tsunemoto
利用探针式振子对介质流体施加超声振动，辅助陶瓷材料深微小孔的微细电火花加工。研究了不同加工条件下加工孔深度、孔几何形状、表面形貌、加工稳定性和刀具材料沉积的变化。结果表明，超声振动不仅会引起搅拌效应，还会产生云空化效应，有利于去除磨屑，防止刀具材料沉积在已加工表面。振动幅值对加工性能有很大影响，在振动电介质中加入纳米碳粉时，加工性能最佳。作为试件，在几分钟内成功地在反应结合碳化硅上制备了直径为10微米、高深宽比(>；20)的微孔。将超声空化和纳米碳粉添加相结合的混合电火花加工工艺可用于制备硬脆陶瓷材料的微结构。(C)2013爱思唯尔有限公司。保留所有权利。
Ultrasonic vibration was applied to dielectric fluid by a probe-type vibrator to assist micro electrical discharge machining of deep micro-holes in ceramic materials. Changes of machined hole depth, hole geometry, surface topography, machining stability and tool material deposition under various machining conditions were investigated. Results show that ultrasonic vibration not only induces stirring effect, but also causes cloud cavitation effect which is helpful for removing debris and preventing tool material deposition on machined surface. The machining characteristics are strongly affected by the vibration amplitude, and the best machining performance is obtained when carbon nanoflbers are added into the vibrated dielectric fluid. As test pieces, micro-holes having 10 mu m level diameters and high aspect ratios ( > 20) were successfully fabricated on reaction-bonded silicon carbide in a few minutes. The hybrid EDM process combining ultrasonic cavitation and carbon nanoflber addition is demonstrated to be useful for fabricating microstructures on hard brittle ceramic materials. (C) 2013 Elsevier Ltd. All rights reserved.