Enhanced impurity incorporation by alternate Te and S doping in GaAs prepared by intermittent injection of triethylgallium and arsine in ultra high vacuum

Enhanced impurity incorporation by alternate Te and S doping in GaAs prepared by intermittent injection of triethylgallium and arsine in ultra high vacuum
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超高真空间歇注入三乙基镓和胂制备的 GaAs 中交替掺杂 Te 和 S 增强杂质掺入

DOI:
10.1016/s0022-0248(02)01784-0
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发表时间:
2002
影响因子:
1.8
通讯作者:
J. Nishizawa
J. Nishizawa
中科院分区:
材料科学3区
文献类型:
--
作者:
Y. Oyama;K. Tezuka;K. Suto;J. Nishizawa

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