Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H(2)environment.

Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H(2)environment.
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双光子激发 LIF 测定低压 H(2) 环境中加热灯丝附近的 H 原子浓度。

DOI:
10.1364/ao.29.004993
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发表时间:
1990
期刊:
影响因子:
1.9
通讯作者:
C. Klages
C. Klages
中科院分区:
工程技术4区
文献类型:
--
作者:
U. Meier;K. KOHSE;L. Schafer;C. Klages

文献摘要

被引文献

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关于低压灯丝辅助化学气相沉积金刚石形成过程的研究,在含有H(2)或H(2)和CH(4)的混合环境中,用双光子激光诱导荧光法测定了加热灯丝附近的原子氢的绝对浓度。得到了不同压力、不同灯丝温度、不同直径和不同材料下的径向氢气浓度分布。考察了不同甲烷加入量对H原子浓度的影响。
With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laserinduced fluorescence in the vicinity of a heated filament in an environment containing H(2) or mixtures of H(2)and CH(4). Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined.