Loss Reduction of GeO2-Doped Silica Waveguide with High Refractive Index Difference by High-Temperature Annealing
Loss Reduction of GeO2-Doped Silica Waveguide with High Refractive Index Difference by High-Temperature Annealing
复制标题
高折射率差GeO2掺杂石英波导的高温退火降低损耗
DOI：
10.1143/jjap.39.l521
复制
发表时间：
2000
影响因子：
1.5
通讯作者：
H. Okano
中科院分区：
文献类型：
--
作者：
S. Kashimura;M. Takeuchi;K. Maru;H. Okano
研究了 GeO2 掺杂芯对高温退火的影响，以降低具有高折射率差 (Δ) 的波导器件的传播损耗。通过射频磁控溅射和反应离子刻蚀在熔融石英衬底上制备了 SiO2-GeO2 波导芯。随着退火温度的升高，磁芯侧壁的粗糙度逐渐消失，矩形磁芯逐渐变圆。平滑和圆化纤芯的效果是显着减少散射损耗，此外，它可以使用传统的等离子体化学气相沉积将纤芯之间的狭窄间隙完全嵌入包层玻璃中。 Δ为1.5%的波导在1.55 µm波长处的传播损耗为0.07 dB/cm，其效果在阵列波导光栅解复用器的制造中得到了证明。
The effect of a GeO2-doped core on high-temperature annealing has been investigated to reduce the propagation loss of a waveguide device with high refractive index difference (Δ). A SiO2–GeO2 waveguide core was prepared on a fused silica substrate by rf magnetron sputtering and reactive ion etching. With increasing the annealing temperature, the roughness of the core side-wall gradually disappears and the rectangular core gradually becomes rounded. The effect of smoothing and rounding the cores was a significant reduction of the scattering loss, and moreover, it enabled the complete embedding of narrow gaps between cores in cladding glass using conventional plasma chemical vapor deposition. The propagation loss of the waveguide with a Δ of 1.5% was 0.07 dB/cm at 1.55 µm wavelength, the effect of which was demonstrated in the fabrication of an arrayed-waveguide grating demultiplexer.