Scanning Electron Microscopy-猫眼课题宝

DOI：

10.1007/978-3-540-38967-5

发表时间：

1984

期刊：

影响因子：

通讯作者：

中科院分区：

其他

文献类型：

作者：

L. Reimer

扫描电子显微镜 (SEM) 传统上是电子显微镜中的灰姑娘，通常被视为生物学家和其他远离物理学的学科的游乐场，并被高分辨率 TEM 所掩盖，而高分辨率 TEM 则由关注原子结构和定量分析的杰出科学家主导。 1935 年，当柏林的马克斯·诺尔 (Max Knoll) 发明并建造了第一台（粗制版）SEM 时，他并没有费心为其申请专利。几年后，柏林西门子和哈尔斯克公司的 von Borries 和 Ruska（第一个在商业 TEM 中实现高分辨率电子显微镜的人）得知，曼弗雷德·冯·阿登纳 (Manfred von Ardenne) 在其位于柏林的私人实验室中获得了西门子开发 SEM 的合同。他们立即要求管理层取消该计划，认为这是浪费公司的资金，因为 SEM“在图像形成方面永远无法与 TEM 竞争，因为串行扫描中的曝光时间不可能比可比的 TEM 图像中的曝光时间长”！这种观点直到场发射枪问世后才发生改变。桌面计算的进步也克服了许多其他困难。如今，SEM 已成为许多科学技术领域的首选显微镜。Reimer 本人始终提出这样的观点：对于所有 SEM 用户来说，了解图像形成的物理原理、电子与样品的相互作用以及有用的仪器操作模式至关重要。赖默认为，这最好由单一作者处理，以确保一致的术语和统一的参考系统。显然很难涵盖该主题的所有方面。因此，成功作者的艺术就是知道在文本和参考文献列表中要省略什么，以便读者可以快速找到他感兴趣的领域和相关参考文献。 Reimer 在漫长的职业生涯中磨练了这项技能，已经出版了《透射电子显微镜》（施普林格光学科学系列第 36 卷）以及本卷的第一版（1985 年），其中记录了过去几年 SEM 的惊人进展；其中包括低至 0.5 kV 的加速电压以及操作和摄影中的计算机控制。值得注意的是，由剑桥大学查尔斯·奥特利爵士提出的启发性建议而产生的埃弗哈特-桑利探测器仍然占据着主导地位。尽管如此，其他专用探测器现在也在使用。再加上广泛使用计算机来控制立柱并生成存储在计算机中的数字图像，导致了“即时”显微照片和存档方法的出现。具有超薄窗口的硅锂能量色散 X 射线探测器的显着改进极大地提高了 SEM 的分析性能，导致 SEM 广泛用于快速分析化学分析。SEM 的好奇心之一是，一些熟悉光学显微镜图像的操作员认为 SEM 图像非常相似并且可以相当容易地解释。这是不正确的，Reimer 费尽心思寻找最合适的 SEM 图像解释理论机制。这本书可以在多个层次上阅读，具体取决于读者的背景和科学好奇心的水平。本书的一个吸引人的特点是，它并没有用引人注目的显微照片来“装饰”，而实际上这些照片的教益却很少。相反，每张经过深思熟虑的图表都充满了信息，例如，显微照片本身通常成对排列，可以讲述诸如背散射电子显微照片中的晶体取向对比等项目。也许应该说一下彼得·霍克斯在“修订英文文本”中的开创性作用……

Scanning electron microscopy (SEM) is traditionally the Cinderella of electron microscopy, often seen as a playground for biologists and other disciplines remote from physics, and overshadowed by high resolution TEM, dominated by eminent scientists concerned with atomic structure and quantitative analysis. When Max Knoll in Berlin invented and constructed the first (crude) SEM in 1935 he did not bother to patent it. Some years later, von Borries and Ruska at Siemens und Halske Berlin, the first to realize high resolution electron microscopy in a commercial TEM, learned that Manfred von Ardenne in his private laboratory in Berlin had been given a contract by Siemens to develop an SEM. They immediately requested the management to cancel it as a waste of the Company's money, since the SEM `could never compete wth the TEM in image formation as the exposure time in serial scanning would be impossibly greater than in a comparable TEM image'! This view changed only when field emission guns became available. Many other difficulties were also overcome by advances in desk-top computing. Today the SEM is the microscope of choice in many areas of science and technology.Reimer himself has always put forward the view that it is vital for all users of SEM to understand the physics of image formation, electron-specimen interaction and useful modes of instrument operation. This is best handled, according to Reimer, by a single author so as to ensure a consistent terminology and a uniform referencing system. It is clearly difficult to include all aspects of the subject. The art of the successful author is therefore to know what to omit, both in the text and the list of references, so that a reader can quickly locate his areas of interest and the relevant references. Reimer has honed this skill over a long career, having already publishedTransmission Electron Microscopy(Volume 36 of the Springer series on optical sciences) as well as the first edition (1985) of the present volume, which records the spectacular advances in SEM over the last few years; these include accelerating voltages down to 0.5 kV and computer control in operation and photography. Remarkably, the Everhart-Thornley detector, arising from an inspired suggestion by Sir Charles Oatley at Cambridge, still holds sway. Nevertheless, other specialized detectors are now also in use. This, together with the extensive use of computers to control the column and produce digital images, stored in a computer, has led to `instant' micrographs and archiving methods. The remarkable improvements in silicon-lithium energy-dispersive x-ray detectors with ultra-thin windows have greatly improved the analytical performance of the SEM, leading to the widespread use of SEM for rapid analytical chemical analysis.One of the curiosities of SEM is that some operators familiar with light microscope images imagine that the SEM image is much the same and can be interpreted fairly easily. This is not true and Reimer has gone to much trouble to seek out the most appropriate theoretical mechanisms for image interpretations in the SEM. The book can be read at many levels, depending on the reader's background and level of scientific curiosity. An attractive feature is that the book is not `dolled up' with striking micrographs that, in fact, teach very little. Instead, each well-thought-out diagram is packed with information, The micrographs themselves, often arranged in pairs, make telling points about items such as crystal orientation contrast in a back-scattered electron micrograph, for example.A word should perhaps be said about the seminal role of Peter Hawkes in `revising the English text' as …

Scanning Electron Microscopy

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