Fabrication of high-electron-mobility ZnO epilayers by chemical vapor deposition using catalytically produced excited water

Fabrication of high-electron-mobility ZnO epilayers by chemical vapor deposition using catalytically produced excited water
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DOI:
10.1016/j.jcrysgro.2009.11.041
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发表时间:
2010-02
影响因子:
1.8
通讯作者:
H. Nishiyama;H. Miura;K. Yasui;Y. Inoue
H. Nishiyama;H. Miura;K. Yasui;Y. Inoue
中科院分区:
材料科学3区
文献类型:
--
作者:
H. Nishiyama;H. Miura;K. Yasui;Y. Inoue

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