A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
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混合 2D/3D 检测概念，具有智能路由优化，可实现高吞吐量、高动态范围和可追溯的关键尺寸计量
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发表时间：
2018
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通讯作者：
Daniel O’Connor
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作者：
Christopher W. Jones;Daniel O’Connor
尺寸表面测量是实现大面积电子产品、微流体结构和光管理薄膜等产品的先进制造过程控制所必需的，在这些产品中，性能由微米级几何形状或在米级衬底上形成的粗糙度决定。虽然能够以低成本执行100%的检测，但常用的2D机器视觉系统本身不足以评估此类3D产品中的所有功能相关的关键尺寸。虽然目前的高分辨率3D测量系统能够评估这些关键尺寸，但它们的视野相对较小，因此速度太慢，无法跟上完整的生产速度。将小视场、高性能的三维地形测量仪与大视场、高通量的2D机器视觉系统相结合，提出了一种2D/3D混合检测的概念。在这个概念中，关键尺寸和缺陷的位置首先使用2D系统进行配准，然后使用智能布线算法和高动态范围(HDR)测量策略来使用3D传感器高效地获取局部地形。具有可跟踪位置参考系统的运动控制平台用于重建各种板材到板材和卷材到卷材的在线测量场景。我们介绍了用于校准这种混合传感器系统的人工制品和程序，用于可追踪尺寸测量，以及对具有光学挑战性的工业测试结构的样本测量。
Dimensional surface metrology is required to enable advanced manufacturing process control for products such as large-area electronics, microfluidic structures, and light management films, where performance is determined by micrometre-scale geometry or roughness formed over metre-scale substrates. While able to perform 100% inspection at a low cost, commonly used 2D machine vision systems are insufficient to assess all of the functionally relevant critical dimensions in such 3D products on their own. While current high-resolution 3D metrology systems are able to assess these critical dimensions, they have a relatively small field of view and are thus much too slow to keep up with full production speeds. A hybrid 2D/3D inspection concept is demonstrated, combining a small field of view, high-performance 3D topography-measuring instrument with a large field of view, high-throughput 2D machine vision system. In this concept, the location of critical dimensions and defects are first registered using the 2D system, then smart routing algorithms and high dynamic range (HDR) measurement strategies are used to efficiently acquire local topography using the 3D sensor. A motion control platform with a traceable position referencing system is used to recreate various sheet-to-sheet and roll-to-roll inline metrology scenarios. We present the artefacts and procedures used to calibrate this hybrid sensor system for traceable dimensional measurement, as well as exemplar measurement of optically challenging industrial test structures.