Analysis of low-temperature surface discharge plasma products from gaseous organic compounds
Analysis of low-temperature surface discharge plasma products from gaseous organic compounds
复制标题
气态有机化合物的低温表面放电等离子体产物的分析
DOI：
10.1109/28.536864
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发表时间：
1996
影响因子：
4.4
通讯作者：
S. Masuda
中科院分区：
文献类型：
--
作者：
T. Oda;R. Yamashita;K. Tanaka;T. Takahashi;S. Masuda
为了更好地了解等离子体处理的分解机制，研究了1000ppm大气压空气、氮气或氧气污染的气态有机化合物（如氯氟烃（CFC-113）、有机氯化物（三氯乙烯）和四氯化碳）的非平衡低温放电等离子体分解产物。采用气相色谱-质谱联用仪作为主要分析设备。当CFC-113的分解率不高（20-80%）时，等离子体处理可识别出许多不同的卤化碳或卤化烃作为中间产物。随着放电电耗的增加，CFC-113的分解速率增加，中间产物减少。在90%以上的分解率下，盐酸、二氧化碳和过氧化氮的一些元素产物被认为是最终产物。另一方面，如果环境气体为纯氮，不含任何氧气和水蒸气，则分解产物仍处于中间状态，放电功耗足够，说明存在氮自由基和氧自由基的双重分解机制。以三氯乙烯分解为例，分解率为20 ~ 90%时，可观察到有害的中间分解产物。
Nonequilibrium low-temperature discharge plasma decomposition products of 1000 ppm gaseous organic compounds contaminated in atmospheric pressure air, nitrogen, or oxygen, such as chlorofluorocarbon (CFC-113), organic chloride (trichloroethylene), and carbon tetrachloride, were studied for a better understanding of the decomposition mechanism of the plasma processing. A gas chromatograph-mass spectrometer was used as a main analyzing equipment. When the decomposition rate is not high (20-80%) for CFC-113, many various halogenated carbons or halogenated hydrocarbons are identified as intermediate products by the plasma processing. As the electric discharge power consumption increases, the decomposition rate of CFC-113 increases and intermediate products decrease. At the decomposition rate of more than 90%, some elemental products of hydrochloric acid, carbon dioxide, and nitrogen suboxide are recognized as final products. On the other hand, if the environmental gas is pure nitrogen without any oxygen and water vapor, the decomposition products are still intermediate with sufficient electric discharge power consumption, suggesting the existence of double decomposition mechanisms of nitrogen radicals and oxygen radicals. In the case of trichloroethylene decomposition, harmful intermediate decomposition products were observed when the decomposition rate was 20-90%.