Rapid and Localized Synthesis of Single-Walled Carbon Nanotubes on Flat Surface by Laser-Assisted Chemical Vapor Deposition
Rapid and Localized Synthesis of Single-Walled Carbon Nanotubes on Flat Surface by Laser-Assisted Chemical Vapor Deposition
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DOI：
10.1143/jjap.46.l333
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发表时间：
2007-03
影响因子：
1.5
通讯作者：
K. Kasuya;K. Nagato;Yusuke Jin;H. Morii;T. Ooi;M. Nakao
中科院分区：
文献类型：
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作者：
K. Kasuya;K. Nagato;Yusuke Jin;H. Morii;T. Ooi;M. Nakao
利用激光辅助化学气相沉积(CVD)技术在平面上控制位置合成了单壁碳纳米管(SWNT)。所开发的包括能量限制层(ECL)的多层衬底能够有效地加热表面的催化剂，从而快速且局部地合成了单壁碳纳米管。以激光为热源，实现了1 S的激光快速合成和直径约为1µm的局域合成。此外，通过以1微米/S的速度扫描激光光斑，实现了线宽为2微米的单壁碳纳米管的线状图案化合成。利用激光辅助化学气相沉积技术在平面上合成单壁碳纳米管，将使基于单壁碳纳米管的纳米器件的制备变得容易和可控。
The synthesis of single-walled carbon nanotubes (SWNTs) at a controlled position on a flat surface was demonstrated by laser-assisted chemical vapor deposition (CVD). The developed multilayer substrate including an energy-confining layer (ECL) enabled the efficient heating of catalysts on the surface, resulting in the rapid and localized syntheses of SWNTs. Using a Nd:YAG laser as a heat source, we achieved the rapid synthesis with laser irradiation for 1 s and the localized synthesis in an area of approximately 1 µm diameter. In addition, the scanning of the laser irradiation spot at a rate of 1 µm/s enabled the line-patterned synthesis of SWNTs at a linewidth of 2 µm. The resulting synthesis of SWNTs on a flat surface by laser-assisted CVD will lead to the easy and controllable fabrication of SWNT-based nanodevices.