Application of carbon nano-powders for a gas micro-preconcentrator
Application of carbon nano-powders for a gas micro-preconcentrator
复制标题
纳米碳粉在气体微浓缩器中的应用
DOI：
10.1016/j.snb.2007.07.029
复制
发表时间：
2007
影响因子：
8.4
通讯作者：
N. Rooij
中科院分区：
文献类型：
--
作者：
C. Pijolat;M. Camara;J. Courbat;J. Viricelle;D. Briand;N. Rooij
本文提出了开发基于硅微反应器技术的气体预浓缩器的可行性研究。目标是选择气体吸附剂材料，生产带有集成加热器的硅微反应器，最后将最合适的吸附剂引入装置的微通道中。报道了与用于开发苯预浓缩装置的碳吸附剂表征相关的初步结果。通过在由气体传感器和非选择性光电离检测器（micro-PID）分析仪组成的专用测试台上测定突破时间，对碳纳米粉末作为吸附材料进行了测试。流体沉积过程允许用碳纳米粉末填充硅微通道。还研究了使用多孔硅来增强微通道中碳纳米颗粒的结合的兴趣。设计并建造了一个装有 0.30 毫克商用活性炭粉末（Aldrich，30-100 nm）的硅微机械预浓缩器。吸附总容量通过突破时间确定，在1l/h、100ppm苯的气流下为2.2min。进行了干燥空气中 100 ppm 和 1.3 ppm 苯预浓缩的初步测试。
This paper presents a feasibility study on the development of a gas preconcentrator based on micro-reactor technology on silicon. The objectives are to select a gas adsorbent material, to produce a silicon micro-reactor with an integrated heater, and finally to introduce the most suitable adsorbent into the micro-channels of the device. Preliminary results related to the characterization of a carbon adsorbent for the development of a device for the preconcentration of benzene are reported. Carbon nano-powders have been tested as adsorbent material by the determination of the breakthrough time on a dedicated test bench consisting of gas sensors and a non-selective photoionization detector (micro-PID) analyzer. A fluidic deposition process allows filling up the silicon micro-channels with the carbon nano-powder. The interest in using porous silicon to enhance the binding of the carbon nano-particles in the micro-channels was also investigated. A silicon micromachined preconcentrator filled with 0.30mg of commercial activated charcoal powder (Aldrich, 30–100nm) was designed and built up. The total capacity of adsorption was determined by using the breakthrough time, which is of 2.2min under a gas flow of 100ppm of benzene at 1l/h. Preliminary tests of preconcentration with 100 and 1.3ppm benzene in dry air were performed.